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Thin film deposition equipment and services
- All-new batch deposition
systems based upon the Perkin-Elmer configuration
- Deposition system
re-manufacturing
- Replacement parts for many
older deposition systems
- Field service for most
deposition systems
- Extended service
contracts with guaranteed "up-time"
- Training for your service
personnel
- Customized PLC-based
automation for older deposition systems
- Process Support for many
PVD and "chemical" processes... and much, much more!

Our modern 9,600 square foot facility
About SEGI
SEGI was founded in 1984.
From the outset, we focused on providing a broad range of products and
services for thin film applications... particularly those applications that
are not in the "mainstream" of semiconductor wafer fabrication.
Not everyone can afford several million dollars for the latest cluster
tool.
More important, such tools are often inappropriate for the needs of a
customer. They are, after all, highly "targeted" systems. What if
they aren't targeted at you?
If that's the case, you've found the right site!
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