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SEGI Series II Automated Sputtering Systems
SEGI has recently begun shipment of our Series II automated sputtering systems.
These systems utilize an entirely new automation hardware/software package
based on PLC and I/O hardware from Automation Direct, and software written
with Think & Do, also from Automation Direct, with a User Interface written in
Visual Basic.
This second generation automation software offers increased functionality and
flexibility. Much of this comes as a result of adopting Serial Communications between the
computer and instrumentation, allowing access to a great deal more data than possible
with Digital and Analog I/O alone.
Maintenance of the system has been dramatically reduced. By going with Serial Communications,
wiring has been cut by more than half and troubleshooting has become easier.
Due to a reduced component requirement, we have also been able to manufacture the system
in a "single footprint" configuration, where all components of the system are mounted on the
system frame, rather than requiring an equipment (bud) rack. This reduces real-estate requirements
and associated cost-of-ownership.
Several models of the Series II sputtering system are available. These include:
- Full Automation (i.e., Model FA2-4TR): Utilizes all-new
components, instrumentation and power supplies. Includes a complete suite of software options and enhancements
for full utilization of the system's capabilities. This versitile, turn-key system is well suited for a production environment
where the process may be changed from time to time. The Full Automation comes with a 24-month warranty.
- Basic Automation (i.e., Model BA2-4TR): A lower-cost
alternative, this model uses many new and some remanufactured components. Starting with minimal
system and process automation, the customer specifies instrumentation, power supplies and software
options. The end result is a custom-configured system designed to exactly meet the customer's needs. The Basic
Automation comes with a 12-month warranty.
- Research Automation (i.e., Model PA2-4TR): This system is
equipped with a Process Chamber only, no Load Lock. Being our lowest-cost automated system, it is designed for
intermittent, low-volume use. This system is configured similar to the Basic Automation, in that it uses many new and
some remanufactured components. It is also equipped with minimal system and process automation, allowing the customer
to specify exactly what hardware and software features are desired. The Research Automation comes with a
12-month warranty.
The Series II sputtering system is available in several sputter head configurations.
Standard target port configurations include:
- 3-Target 8-Inch Round (i.e., Model FA2-3TR)
- 4-Target 8-Inch Round (i.e., Model FA2-4TR)
- 5-Target 6-Inch Round (i.e., Model FA2-5TR)
- 3-Target Delta (i.e., Model FA2-3TD)
Please consult with an SEGI representative for other custom target port configurations.
Many process-related and hardware options are available. These include: Co-Deposition (RF/RF,
DC/DC, and RF/DC), Pulsed Deposition, Substrate Heating, Substrate Pallets, Enhanced Uniformity for Deposition Thickness,
Turbo Pumping for the Load Lock, RGA's, and others.
We invite you to stop by our facility for a tour and to see the systems
currently being manufactured.
Process
Support
Through consultants and external third party analysis laboratories, SEGI
can now offer processing assistance and thin film diagnostics. This support
offering is very flexible, and can range from simple references to
appropriate support and diagnostic services through a complete support
package tailored to your needs.
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